VARIAN | TV301 Pump Specification
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VARIAN
TV301 Pump Specification
| Parameter | TV301 | ||||
|---|---|---|---|---|---|
| Pumping speed | With CFF 8" or ISO 160 | With CFF 6" or ISO 100 | |||
| N₂ | 280 l/s | 250 l/s | |||
| He | 230 l/s | 220 l/s | |||
| H₂ | 210 l/s | 200 l/s | |||
| Compression ratio | N₂ | >2 x 10⁸ | |||
| He | 1 x 10⁵ | ||||
| H₂ | 2 x 10⁴ | ||||
| Base pressure (with recommended forepump) |
* mechanical: < 2 x 10⁻¹⁰ mbar (< 1.5 x 10⁻¹⁰ Torr) | ||||
| Inlet flange | CFF 8" O.D. ISO 160 CFF 6" O.D. ISO 100 | ||||
| Foreline flange | KF16 NW (KF25 – optional) | ||||
| Rotational speed | 56,000 rpm | ||||
| Start-up time | < 3 minutes | ||||
| Recommended forepump | mechanical: Agilent DS 102 | ||||
| mechanical: Agilent DS 302 | |||||
| dry pump: Agilent SH 110 | |||||
| Operating position | Any | ||||
| Cooling requirements | Natural air convection, Forced air or water optional | ||||
| Operating ambient temperature | + 5° C to + 35° C | ||||
| Cooling water | flow: 200 l/h (0.89 GPM) temperature: + 10° C to + 30° C pressure: 3 to 5 bar (45 to 75 Psi) | ||||
| Bakeout temperature | 120° C at inlet flange max.(CF flange) 80° C at inlet flange max.(ISO flange) | ||||
| Noise level | ≤ 45 dB (A) at 1 meter | ||||
| Pwr supply (mains) | Input voltage | 100 - 240 Vac | |||
| Input freq. | 50 - 60 Hz | ||||
| Max input pwr | 300 VA | ||||
| Stand-by pwr | 10 W | ||||
| Max oper. power | 150 W with water or air cooling | ||||
| Protection fuse | 4 A | ||||
