VARIAN | TV551 Navigator Pump Specification
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Writer 혜성테크놀… Date20-06-09 16:50 View 1,500 Comment0Related Links
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VARIAN
TV551 Navigator Pump Specification
| Parameter | TV551 | |||
|---|---|---|---|---|
| Pumping speed (with inlet screen) |
CFF 6" | CFF 8"/ISO160 | ||
| N₂ | 350 l/s | 550 l/s | ||
| He | 450 l/s | 600 l/s | ||
| H₂ | 450 l/s | 510 l/s | ||
| Compression ratio | N₂ | 1 x 10⁹ | ||
| He | 1 x 10⁷ | |||
| H₂ | 1 x 10⁶ | |||
| Base pressure (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange and using the recommended pre-vacuum pump) |
* with minimum recommended mechanical pump: < 1 x 10⁻¹⁰ mbar (< 1 x 10⁻¹⁰ Torr) * with minimum recommended diaphragm pump: 2 x 10⁻⁹ mbar (1.5 x 10⁻⁹ torr) | |||
| Inlet flange | ISO 160, CF 6", CF 8” | |||
| Foreline flange | KF 25 NW | |||
| Rotational speed | 42000 rpm | |||
| Start-up time | < 5 minutes | |||
| Recommended forepump | Mechanical | Agilent DS 302 | ||
| Dry | Agilent Triscroll PTS 300 | |||
| Operating position | Any | |||
| Operating ambient temperature | +5 °C to +35 °C | |||
| Cooling requirements | Natural air convection
Water optional (use water with electrical conductivity ≤ 500 μS/cm) | |||
| Cooling water | flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C pressure: 3 to 5 bar (45 to 75 Psi) | |||
| Bakeout temperature | 120° C at inlet flange max.(CF flange)
80° C at inlet flange max.(ISO flange) | |||
| Max permissible rotor temperature | 120 °C | |||
| Vibration level (displacement) | < 0.01 μm at inlet flange | |||
| Lubricant | permanent lubrication | |||
| Noise level | <45 dB(A) at 1 meter | |||
| Weight kg (lbs) | ISO flange | 19.4 (43) | ||
| CF flange | 23.4 (51.6) | |||
