PFEIFFER | HiPace 80 Pump Specification
About page
Writer 혜성테크놀… Date20-05-18 15:32 View 1,397 Comment0Related Links
Text
PFEIFFER HiPace 80 Pump Specification
Parameter | HiPace 80 | HiPace 80 | HiPace 80 |
---|---|---|---|
Flange (in) | DN 63 ISO-K | DN 63 CF-F | DN 40 ISO-KF |
Flange (out) | DN 16 ISO-KF / G 1/4" | DN 16 ISO-KF / G 1/4" | DN 16 ISO-KF / G 1/4" |
Pumping speed for Ar | 66 l/s | 66 l/s | 30 l/s |
Pumping speed for H2 | 48 l/s | 48 l/s | 38 l/s |
Pumping speed for He | 58 l/s | 58 l/s | 41 l/s |
Pumping speed for N2 | 67 l/s | 67 l/s | 35 l/s |
Compression ratio for Ar | > 1 · 1011 | > 1 · 1011 | > 1 · 1011 |
Compression ratio for H2 | 1.4 · 105 | 1.4 · 105 | 1.4 · 105 |
Compression ratio for He | 1.3 · 107 | 1.3 · 107 | 1.3 · 107 |
Compression ratio for N2 | > 1 · 1011 | > 1 · 1011 | > 1 · 1011 |
Gas throughput at full rotational speed for Ar | 0.54 mbar l/s | 0.54 mbar l/s | 0.54 mbar l/s |
Gas throughput at full rotational speed for He | 2.7 mbar l/s | 2.7 mbar l/s | 2.7 mbar l/s |
Gas throughput at full rotational speed for H2 | 15.3 mbar l/s | 15.3 mbar l/s | 15.3 mbar l/s |
Gas throughput at full rotational speed for N2 | 1.3 mbar l/s | 1.3 mbar l/s | 1.3 mbar l/s |
Fore Vacuum max. for Ar | 23 mbar | 23 mbar | 23 mbar |
Fore Vacuum max. for CF4 | 20 mbar | 20 mbar | 20 mbar |
Fore Vacuum max. for H2 | 14 mbar | 14 mbar | 14 mbar |
Fore Vacuum max. for He | 22 mbar | 22 mbar | 22 mbar |
Fore Vacuum max. for N2 | 22 mbar | 22 mbar | 22 mbar |
Run-up time | 1.7 min | 1.7 min | 1.7 min |
Ultimate pressure with OnToolTM DryPump | < 1 · 10-7 mbar | < 5 · 10-10 mbar | < 1 · 10-7 mbar |
Rotation speed ± 2 % | 90000 rpm | 90000 rpm | 90000 rpm |
Rotation speed: variable | 20-100 % | 20-100 % | 20-100 % |
Power characteristic line in gas mode 1, vertex A | 80/90000 W/rpm | 80/90000 W/rpm | 80/90000 W/rpm |
Power characteristic line in gas mode 1, vertex B | 80/84000 W/rpm | 80/84000 W/rpm | 80/84000 W/rpm |
Power characteristic line in gas mode 0, vertex C | 56/90000 W/rpm | 56/90000 W/rpm | 56/90000 W/rpm |
Power characteristic line in gas mode 0, vertex D | 65/81000 W/rpm | 65/81000 W/rpm | 65/81000 W/rpm |
Power characteristic line in gas mode 2, vertex E | 80/90000 W/rpm | 80/90000 W/rpm | 80/90000 W/rpm |
Power characteristic line in gas mode 2, vertex F | 80/84000 W/rpm | 80/84000 W/rpm | 80/84000 W/rpm |
Sound pressure level | ≤ 48 dB (A) | ≤ 48 dB (A) | ≤ 48 dB (A) |
Relative humidity of air | 5-85, noncondensing % | 5-85, noncondensing % | 5-85, noncondensing % |
Protection category | IP 54 | IP 54 | IP 54 |
Connection pressure max. for venting/sealing gas valve | 1.5 bar | 1.5 bar | 1.5 bar |
Operating voltage | 24 ± 5 % V DC | 24 ± 5 % V DC | 24 ± 5 % V DC |
Operating voltage power supply | 90-265 V AC | 90-265 V AC | 90-265 V AC |
Integral leak rate | < 1 · 10-7 mbar l/s | < 1 · 10-7 mbar l/s | < 1 · 10-7 mbar l/s |
Power consumption max. | 110 W | 110 W | 110 W |
Current consumption max. | 4.6 A | 4.6 A | 4.6 A |
Venting connection | G 1/8" | G 1/8" | G 1/8" |
Weight | 2.4 kg | 3.8 kg | 2.4 kg |
Cooling method, standard | Convection | Convection | Convection |
Cooling method, optional | Air/Water | Air/Water | Air/Water |
Cooling water temperature | 5-25 °C | 5-25 °C | 5-25 °C |
Cooling water consumption | 75 l/h | 75 l/h | 75 l/h |
Permissible magnetic field max. | 3.3 mT | 3.3 mT | 3.3 mT |
Interfaces | RS-485, Remote | RS-485, Remote | RS-485, Remote |