LEYBOLD | TMP361 series Specification
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Writer 혜성테크놀… Date20-06-15 09:39 View 1,524 Comment0Related Links
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LEYBOLD TMP361 Series Specification
[이 게시물은 혜성테크놀…님에 의해 2020-06-18 09:09:53 specification에서 복사 됨]
Parameter | TMP361 | TMP361C | ||||
---|---|---|---|---|---|---|
High-vacuum port | 100 ISO-K 100 CF nom. diam. |
160 ISO-K 160 CF nom. diam. |
100 ISO-K nom. diam. |
160 ISO-K nom. diam. | ||
Pumping speed for N₂ | 345 l/sec | 400 l/sec | 345 l/sec | 400 l/sec | ||
Ultimate pressure | < 10⁻¹⁰ mbar | |||||
Forevacuum pressure | 0.5 mbar | |||||
Recommended forevacuum Pump |
D 16 B TRIVAC | D 25 B TRIVAC | ||||
Recommended frequency converter |
20 NT | |||||
Speed | 45,000 rpm | |||||
Run-up time approx. | 2 min | |||||
Coolant connection nozzle | 10 mm | |||||
Coolant temperature | 10 – 25 °C | |||||
Coolant flow rate at 15 °C |
20 l·h⁻¹ | |||||
Forevacuum port | 25 KF nom. diam. | |||||
Purge gas port | - | 10 KF nom. diam. | ||||
Vent port | 10 KF nom. diam. | |||||
Weight approx. | 12 kg | |||||
Max. ambient temperature at operation |
55 °C | |||||
Max. bakeout temperature at CF flange |
100 °C | - |