ADIXEN | ATH2303M Pump specification
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Writer 혜성테크놀… Date20-06-08 16:14 View 1,514 Comment0Related Links
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ADIXEN(ALCATEL)
ATH2303M Pump Specification
| Parameter | ATH2303M | ||
|---|---|---|---|
| Flange (inlet) | ISO-K DN 200 | ISO-K DN 250 | |
| Flange (exhaust) | ISO KFDN 40 | ||
| Pumping speed | Ar | 1450 | 2000 |
| H2 | 1100 | 1100 | |
| He | 1650 | 1800 | |
| N2 | 1550 | 2150 | |
| Compression rate | Ar | > 1 · 10⁸ | |
| H2 | 1 · 10³ | ||
| He | 3 · 10⁴ | ||
| N2 | > 1 · 10⁸ | ||
| Gas throughput | Ar | 1500 sccm | |
| H2 | > 4000 sccm | ||
| He | > 4000 sccm | ||
| N2 | 4000 sccm | ||
| Fore vacuum max. | Ar | 3.5 hPa | |
| H2 | 0.75 hPa | ||
| He | 2 hPa | ||
| N2 | 2.9 hPa | ||
| Inlet vacuum max. | Ar | 0.025 hPa | |
| H2 | - | ||
| He | - | ||
| N2 | 0.25 hPa | ||
| Ultimate pressure | < 6· 10⁻⁹ | ||
| Nominal rotation speed | 31,000 tr/mn | ||
| Stand-by speed | from 15 000 (250) to nominal speed | ||
| Sound pressure level | < 47 db(A) | ||
| Pump protection index | IP 42 | ||
| Controller power supply | 200-240 (50/60) (Hz) V | ||
| Maximum leakage current | < 12 mA | ||
| Max. start-up supply | 1200 W | ||
| Power consumption at ultimate pressure | < 200 W | ||
| Max. apparent start-up power | 2100 VA | ||
| Mounting orientation | any | ||
| N2 purge flange | ISO KF DN 16 | ||
| Integral leak rate | < 5 · 10⁻⁸ hPa l/s | ||
| Run-up time up to 90 % of nominal rotation speed, with exhaust pressure < 0,1 hPa |
< 8 min | ||
| Maximum baking temperature | 120 °C | ||
| Recommended purge flow rate | 50 sccm | ||
| Vibration level at nominal speed | < 0,01 μm | ||
| Maximum water line pressure | 7·10³ hPa | ||
| Weight of the pump | 60 (132.3) (kg) lb | ||
