EDWARDS | STP-XA2703C Specification
About page
Writer 혜성테크놀… Date20-06-29 11:24 View 2,244 Comment0Related Links
Text
EDWARDS
STP-XA2703C Specification
| Parameter | STP-XA2703C | ||
|---|---|---|---|
| Inlet Flange size |
ISO250F/VG250 | ||
| Pumping speed (L/s) |
N₂ | 2650 | |
| H₂ | 2050 | ||
| Compression ratio | N₂ | >10 ⁸ | |
| H₂ | 6×10 ³ | ||
| Ultimate pressure | 10⁻⁷ order | ||
| Maximum allowable backing pressure | 266 | ||
| Maximum allowable gas flow, N2 | 3000 (5.0) | ||
| Maximum allowable gas flow, AR | 2000 (3.4) | ||
| Rated speed | 27,500 rpm | ||
| Starting time | 8 min | ||
| Stopping time | 8 min | ||
| Mounting position | Any orientation | ||
| Water cooling | Flow | 3 Litres/min | |
| Temperature | 5-25 °C (41-77 °F) | ||
| Pressure | 0.3 MPa | ||
| Recommended purge gas flow | 50 sccm (8.4 x 10-2 Pa m3 /s) | ||
| Input voltage | 200-240 +/- 10% AC V | ||
| Typical power consumption | 1.5 KVA | ||
| Weight, pump/controller | 75/12 kg (165/26.4 lb) | ||
