SHIMADZU | TMP-V2304LM Pump Specification
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Writer 혜성테크놀… Date20-06-17 10:03 View 1,437 Comment0Related Links
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SHIMADZU
TMP-V2304LM Pump Specification
| Parameter | TMP-V2304LM | ||
|---|---|---|---|
| Battery | Not Necessary | ||
| Inlet flange | ISO250B / VG250 | ||
| Outlet flange | KF40 | ||
| Cooling Method | Water Cooled | ||
| Mass | 56kg | ||
| Ultimate pressure (after baking) | 10⁻⁷ Pa order | ||
| Maximum allowable inlet pressure | 4.5 Pa | ||
| Maximum allowable outlet pressure | 200 Pa | ||
| Pumping speed | N₂ | 2100 L/s | |
| Ar | 2000 L/s | ||
| Compression ratio | N₂ | 1 × 10⁸ or more | |
| He | 5 × 10³ | ||
| H₂ | 9 × 10² | ||
| Rated speed | 33,700 rpm | ||
| Start-up time | 9 mimutes or less | ||
| Mounting position | In any desired direction | ||
| Vibration level (by Shimadzu's method) |
0.01 μm or less (0-peak) | ||
| Recommended flow rate of purge gas | 30 mL/min | ||
| Recommended pumping speed of backing pump in case of gas purge |
1500 L/min or more | ||
| Display | LED | POWER / STATUS / ROTATION / NET | |
| Communication | Contact | - REMOTE (D-sub 37pin female, Screw lock size M2.6 ) (cf.Section 6.7 "Remote-Control Connector") - Input：START / STOP / RESET / LOW SPEED - Output：ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION | |
| Serial | - RS-232C ／ RS-485 (D-sub 9pin male, Screw lock size M2.6) (cf.Section 6.8 "Communication Specifications") | ||
| Speed variation | Speed is variable between 25% and 100% of the reted speed (set as 0.1%) | ||
| Alarm History | Remembers date, time, and description of last 99 alarm events. | ||
