SHIMADZU | TMP-3403LMC Specification
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SHIMADZU
TMP-3403LMC Specification
| Parameter | TMP-3403LMC | |
|---|---|---|
| Cooling method | Water | |
| Ultimate pressure | 10⁻⁷ Pa order | |
| Maximum Argon gas through put |
2200 mL/min | |
| Maximum allowable inlet pressure (Nitrogen gas) |
10 Pa | |
| Maximum allowable outlet pressure |
270 Pa | |
| Pumping speed | nitrogen | 3300 L/s |
| helium | 3100 L/s | |
| hydrogen | 2400 L/s | |
| Compression ratio | nitrogen | 1 × 10⁹ or more |
| helium | 3 × 10⁵ | |
| hydrogen | 1 × 10⁴ | |
| Rated speed | 22,020 rpm | |
| Start-up time | 15 minutes or less | |
| Mounting position | In any desired direction | |
| Bake-out temperature at an inlet flange |
120 ℃ or less | |
| Vibration level (by Shimadzu's method) |
0.01μm or less (0-peak) | |
| Inlet flange | VG350 | |
| Outlet flange | KF40 | |
| Mass | 70 kg | |
| Admissible throughput of purge gas |
20 to 30 mL/min | |
| Admissible pumping speed of backing vacuum pump in case of gas purge |
1500 L/min or more | |
| Environmental Temperatures | Operation : 0 to 40 ℃ Storage : -25 to 70 ℃ | |
| Admissible ambient magnetic field |
Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Water | Flow rate | 2 to 4 L/min |
| Pressure | 0.2 to 0.5 MPa | |
| Temperature | 5 to 25 ℃ | |
