ULVAC | UTM-1400FW Pump Specification
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ULVAC
UTM-1400FW Pump Specification
| Parameter | UTM-1400FW | |||||
|---|---|---|---|---|---|---|
| Flange size | Inlet | JIS VG250 | JIS VG200 | CF253 | ||
| Outlet | NW40 | |||||
| Pumping speed (L/s) | N₂ | 1490 | 1360 | 1300 | ||
| H₂ | 890 | 860 | 860 | |||
| Max. compression ratio | N₂ | > 10⁹ | ||||
| H₂ | 6×10³ | |||||
| Rotor blade surface treatment | Ni-Plating | |||||
| Max. pressure at inlet (at max. flow) |
N₂ | 13 | ||||
| Max. pressure at outlet (at max. flow) |
N₂ | 240 | ||||
| Max. flow rate of N2 SCCM(Pa L/s) | 1400 (2360) | |||||
| Max. flow rate of Ar SCCM(Pa L/s) | 1100 (1680) | |||||
| Ultimate pressure | 10⁻⁸ Pa | |||||
| Rotational speed | 32,100 rpm | |||||
| Acceleration/deceleration time | Approx. 7/7 min | |||||
| Bearing type | Totally active magnetic bearings | |||||
| Baking temperature | ≦ 120 ℃ | |||||
| Cooling | Water | |||||
| Cooling water port/ Flow rate of cooling water |
Rc 3/8／≧ 3 L/min | |||||
| Pressure drop of cooling water between inlet and outlet |
≧0.05 MPa | |||||
| Gas purge port/flow rate SCCM (PaL/s) | NW 10/25 (42) | |||||
| Weight | Approx. 36 kg | |||||
| Recommended backing vacuum pump |
800 L/min | |||||
| Noise level | 63 dBA | |||||
| Torque at Rotor destruction | 5.0×10³ N・m | |||||
| Motor drive system | Control Unit | VVVF | ||||
| Output frequency | 535 Hz | |||||
| Power consumption | 1.2 kVA | |||||
| Input voltage | 200 ～ 240±10% ACV | |||||
| Input frequency | 50／60 Hz | |||||
| Phase | Single | |||||
| Ambient temperature | 0 ～ 40 ℃ | |||||
| Weight | Approx. 10 kg | |||||
