ULVAC | UTM-350FH Pump Specification
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ULVAC
UTM-350FH Pump Specification
| Parameter | UTM-350FH | ||||
|---|---|---|---|---|---|
| Flange size | Inlet | JIS VG1000 | ICF152 | ||
| Outlet | NW25 | ||||
| Pumping speed (L/s) | N₂ | 350 | 330 | ||
| H₂ | 320 | 310 | |||
| Max. compression ratio | N₂ | > 10¹⁰ | |||
| H₂ | 1×10⁴ | ||||
| Rotor blade surface treatment | Ni-Plating | ||||
| Max. pressure at inlet (at max. flow) |
N₂ | 43 | |||
| Max. pressure at outlet (at max. flow) |
N₂ | 410 | |||
| Max. pressure at outlet (at 100SCCM) |
N₂ | 930 | |||
| Max. flow rate of N2 SCCM(Pa L/s) | 850 (1430) | ||||
| Max. flow rate of Ar SCCM(Pa L/s) | 370 (620) | ||||
| Ultimate pressure | 10⁻⁸ Pa | ||||
| Rotational speed | 45,000 rpm | ||||
| Acceleration/deceleration time | Approx. 4/4 min | ||||
| Bearing type | Totally active magnetic bearings | ||||
| Baking temperature | ≦ 120 ℃ | ||||
| Cooling | Water | ||||
| Cooling water port/ Flow rate of cooling water |
Rc 3/8／≧ 3 L/min | ||||
| Pressure drop of cooling water between inlet and outlet |
≧0.05 MPa | ||||
| Gas purge port/flow rate | NW 10/10 (17) SCCM (PaL/s) | ||||
| Weight | Approx. 17 kg | ||||
| Recommended backing vacuum pump |
290 L/min | ||||
| Noise level | 64 dBA | ||||
| Torque at Rotor destruction | 1.3×10³ N・m | ||||
| Motor drive system | Control Unit | VVVF | |||
| Output frequency | 750 Hz | ||||
| Power consumption | 0.6 kVA | ||||
| Input voltage | 200 ～ 240±10% ACV | ||||
| Input frequency | 50／60 Hz | ||||
| Phase | Single | ||||
| Ambient temperature | 0 ～ 40 ℃ | ||||
| Weight | Approx. 10 kg | ||||
