VARIAN | TwisTorr 74 FS Pump Specification

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VARIAN

TwisTorr 74 FS Pump Specification

Parameter		TwisTorr 74 FS
Pumping speed		KF40	CFF 2.75”	ISO 63	CFF 4.5”
	N₂	44 L/s	50 L/s	60 L/s	60 L/s
	He	33 L/s	40 L/s	54 L/s	54 L/s
	H₂	28 L/s	31 L/s	42 L/s	42 L/s
	Ar	40 L/s	51 L/s	59 L/s	59 L/s
Max Gas Throughput		Air Cooling (35°C ambient temperature)		Water Cooling (25°C water temp. / 35°C ambient temp.)
	N₂	130 sccm		130 sccm
	Ar	80 sccm		80 sccm
Backing pump 5 m3/h
Compression ratio and foreline tolerance	N₂	1.0 x 10⁹		>12 mbar
	He	2.0 x 10⁵		>10 mbar
	H₂	1.0 x 10⁴		>04 mbar
	Ar	> 1.0 x 10⁹		>14 mbar
Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode
Base pressure with recomm. forepump		< 5 x 10-10 mbar (< 3.75 x 10⁻¹⁰ Torr)
Inlet flange		KF 40, ISO 63, CFF 4.5”, CFF 2.75”
Foreline flange		KF16 NW
Rotational speed		70000 rpm (1167 Hz driving frequency)
Start-up time		< 2 minutes
Recommended forepump		Agilent DS 40M / DS 102 Rotary Vane Pump Agilent IDP-3/IDP-7 Dry Scroll Pump
Cooling requirements		Natural air convection Forced air or water optional
Operating position		Any
Oper. ambient temp.		+5 °C to +35 °C
Rel. humidity of air		0 - 90 % (not condensing)
Bakeout temp.		80 °C for ISO (120 °C for CFF) at inlet flange
Lubricant		permanent lubrication
Cooling requirements
Air cooling		Forced air (5-35 °C ambient temp.) Air flow temperature +5° C to +35 °C
Water cooling		Water temperature from +15°C to +25°C Water flow min. 65 L/h
Noise Pressure level (at 1 mt at full speed)		40 dB(A)
Storage temp.		-40 °C to +70 °C
Max altitude		3000 m
Weight kg (lbs)		ISO 63	2.05 (4.50)
		CFF 4.5”	3.50 (7.70)
		CFF 2.75”	3.34 (7.35)
		KF 40	2.37 (5.22)

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