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ADIXEN | ATH1600M/MT Pump Specification

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ADIXEN(ALCATEL)

ATH1600M/MT Pump Specification


Parameter ATH1600M/MT
Flange, DN 200 ISO-K
200 CF-F
250 ISO-K
250 CF-F
Maximum rotation speed, rpm 39,000
Standby speed, rpm 15000 to 39000
Pumping speed, l/s N₂ 1400  1500
He 1150  1150
H₂ 750  750
Compression rate H2 6 · 10⁷
He 8 · 10³
N2 3 · 10²
Ultimate pressure without purge, meas.
according to Pneurop standard,
mTorr/mbar
4.5 * 10⁻ / 6 * 10
Maximum pressure at inlet
in continuous operation, mbar
0.2
Maximum permissible
pressure at exhaust, mbar
1.5
Maximum flowrate with N2 (heated),
SCCM
1000
Maximum flowrate with N2 (unheated),
SCCM
2500
Purging maximum flow rate,
SCCM
50
Pressure with 100 SCCM flow,
mTorr/mbar
0.95 / 1.46x10³
Pressure with 200 SCCM flow,
mTorr/mbar
1.92 / 3.0x10³
Vibration level at maximal speed, μm < 0.01
Mounting orientation Any
Power supply required
for heater band (MT)
100-120 V - 50/60 Hz
200-240 V - 50/60 Hz
135 W
Start-up time, min < 6
Maximum start-up power, W 650
Maximum operating power, W 300
Cooling water flow rate, l/h < 60
Water temperature, °C 15 < T < 25
Maximum ambient temperature, °C 40
Weight (DN 160 ISO-K model), kg (lb) 35.5 (78.8)
Recommended forepump ADP / ADS
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