ULVAC | UTM-3302FH Pump Specification
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ULVAC
UTM-3302FH Pump Specification
| Parameter | UTM-3302FH | ||||
|---|---|---|---|---|---|
| Flange size | Inlet | JIS VG350 | |||
| Outlet | NW40 | ||||
| Pumping speed (L/s) | N₂ | 3300 | |||
| H₂ | 2300 | ||||
| Max. compression ratio | N₂ | > 10¹¹ | |||
| H₂ | 6×10⁴ | ||||
| Rotor blade surface treatment | Non | ||||
| Max. pressure at inlet (at max. flow) |
N₂ | 7 | |||
| Max. pressure at outlet (at max. flow) |
N₂ | 220 | |||
| Max. flow rate of N2 *4 SCCM(Pa L/s) | 1800 (3030) | ||||
| Max. flow rate of Ar*4 SCCM(Pa L/s) | 1100 (1850) | ||||
| Ultimate pressure | 10⁻⁸ Pa | ||||
| Rotational speed | 21,600 rpm | ||||
| Acceleration/deceleration time | Approx. 12/16 min | ||||
| Bearing type | Totally active magnetic bearings | ||||
| Baking temperature | ≦ 120 ℃ | ||||
| Cooling | Water | ||||
| Cooling water port/ Flow rate of cooling water |
Rc 3/8／≧ 3 L/min | ||||
| Pressure drop of cooling water between inlet and outlet |
≧0.05 MPa | ||||
| Weight | Approx. 90 kg | ||||
| Recommended backing vacuum pump |
1500 L/min | ||||
| Noise level | 58 dBA | ||||
| Torque at Rotor destruction | 2.2×10⁴ N・m | ||||
| Motor drive system | Control Unit | VVVF | |||
| Output frequency | 360 Hz | ||||
| Power consumption | 1.6 kVA | ||||
| Input voltage | 200 ～ 240±10% ACV | ||||
| Input frequency | 50／60 Hz | ||||
| Phase | Single | ||||
| Ambient temperature | 0 ～ 40 ℃ | ||||
| Weight | Approx. 10 kg | ||||
