EDWARDS | STP-A2203 Series Specification
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EDWARDS
STP-A2203 Series Specification
| Parameter | STP-A2203 Series | |||
|---|---|---|---|---|
| Flange size |
Inlet port flange | VG250/ISO250F/ICF305 | ||
| Outlet port flange | KF40 | |||
| Pumping speed (L/s) |
N₂ | 2200 | ||
| H₂ | 1700 | |||
| Compression ratio | N₂ | >10 ⁸ | ||
| H₂ | 2.5×10 ⁴ | |||
| Ultimate pressure | 10⁻⁶(10⁻⁸) order (after baking) Pa | |||
| Maximum gas flow-rate | 2.5 (1500) Pa・m3/s (SCCM) : Water cooling 2.0 (1200) Pa・m3/s (SCCM) : TMS unit used | |||
| Maximum working pressure | 2.7 (0.02) Pa (Torr)：Water cooling 1.7 (0.013) Pa (Torr)：TMS unit used | |||
| Allowable backing pressure | 400 (3) Pa (Torr):Water cooling/TMS unit used | |||
| Rated speed | 27,000 rpm | |||
| Starting time | 7 min | |||
| Stopping time | 8 min | |||
| Noise | <50 (at 27,000rpm) dB | |||
| Baking temperature | <120 °C | |||
| Lubricating oil | Not necessary | |||
| Installation position | Free | |||
| Cooling method |
Water cooling | |||
| Backing pump | >1,300 L/min | |||
| Mass | 61 kg | |||
| Ambient temperature range | 0 to 40 °C | |||
| Storage temperature range | - 20 to + 55 °C | |||
