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SHIMADZU | TMP-3203 series Specification

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SHIMADZU

TMP-3203 series Specification


Parameter TMP-3203M TMP-3203MC  TMP-3203LM  TMP-3203LMC
Cooling method Cooling fan Water
Ultimate pressure 10 Pa order 10 Pa order 10 Pa order 10 Pa order
Maximum Argon gas
through put
250 mL/min 400 mL/min 1200 mL/min 2200 mL/min
Maximum allowable
inlet 
pressure
(Nitrogen gas)
0.4 Pa 40 Pa
Maximum allowable
outlet 
pressure
40 Pa 270 Pa
Pumping speed nitrogen 3200 L/s
helium 3000 L/s
hydrogen 2400 L/s
Compression ratio nitrogen 1 × 10 or more
helium 3 × 10⁵
hydrogen 1 × 10⁴
Rated speed 21,000 rpm
Start-up time 13 minutes or less
Mounting position In any desired direction
Bake-out
temperature
at an inlet flange
120 ℃ or less
Vibration level
(by Shimadzu's
method)
0.01μm or less (0-peak)
Inlet flange VG350
Outlet flange KF40
Mass 70 kg
Admissible
throughput of
purge gas
20 to 30 mL/min
Admissible pumping speed
of 
backing vacuum pump
in case of gas purge
1500 L/min or more
Environmental Temperatures Operation : 0 to 40 ℃
Storage : -25 to 70 ℃
Admissible
ambient
magnetic
field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate N/A 2 to 4 L/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 25 ℃
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