PFEIFFER | HiPace300 Pump Specification
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PFEIFFER HiPace300 Pump Specification
Parameter | HiPace 300 | ||
---|---|---|---|
Flange (in) | DN 100 ISO-K | DN 100 CF-F | DN 100 ISO-F |
Flange (out) | DN 16 ISO-KF | DN 16 ISO-KF | DN 16 ISO-KF |
Pumping speed for Ar | 255 l/s | ||
Pumping speed for CF₄ | 200 l/s | ||
Pumping speed for H₂ | 220 l/s | ||
Pumping speed for He | 255 l/s | ||
Pumping speed for N₂ | 260 l/s | ||
Compression ratio for Ar | > 1 · 10¹¹ | ||
Compression ratio for CF₄ | > 1 · 10¹¹ | ||
Compression ratio for H₂ | 9 · 10⁵ | ||
Compression ratio for He | > 1 · 10⁸ | ||
Compression ratio for N₂ | > 1 · 10¹¹ | ||
Gas throughput at full rotational speed for Ar | 7 mbar l/s | ||
Gas throughput at full rotational speed for CF₄ | 8 mbar l/s | ||
Gas throughput at full rotational speed for He | 20 mbar l/s | ||
Gas throughput at full rotational speed for H₂ | > 14 mbar l/s | ||
Gas throughput at full rotational speed for N₂ | 14 mbar l/s | ||
Fore Vacuum max. for N₂ | 25 mbar | ||
Fore Vacuum max. for CF₄ | 20 mbar | ||
Fore Vacuum max. for He | 8.5 mbar | ||
Fore Vacuum max. for H₂ | 20 mbar | ||
Fore Vacuum max. for N₂ | 20 mbar | ||
Ultimate pressure with OnToolTM DryPump | < 1 · 10-7 mbar | < 5 · 10-10 mbar | < 1 · 10-7 mbar |
Run-up time | 1.8 min | ||
Ultimate pressure | < 1 · 10⁻⁷ hPa |
< 1 · 10⁻¹⁰ hPa | |
Rotation speed ± 2 % | 60,000 rpm | ||
Rotation speed: variable | 20-100 % | ||
Sound pressure level | ≤ 50 dB (A) | ||
Protection category | IP 54 | ||
Operating voltage | 100-120/200-240 V AC, 50/60 Hz | ||
Operating voltage power supply | 90-265 V AC | ||
Integral leak rate | < 1 · 10⁻⁷ mbar l/s | ||
Power consumption max. | 300 W | ||
Current consumption max. | 12.5 A | ||
Venting connection | G 1/8" | ||
Weight | 6.7 kg | 8.7 kg | 7 kg |
Cooling method, standard | Water | ||
Cooling method, optional | Air | ||
Cooling water temperature | 15-35 °C | ||
Cooling water consumption | 50 l/h | ||
Permissible magnetic field max. | 5.5 mT | ||
Interfaces | RS-485, Remote |