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PFEIFFER | HiPace300 Pump Specification

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PFEIFFER HiPace300 Pump Specification

Parameter HiPace 300
Flange (in) DN 100 ISO-K DN 100 CF-F DN 100 ISO-F
Flange (out) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF
Pumping speed for Ar 255 l/s
Pumping speed for CF₄ 200 l/s
Pumping speed for H₂ 220 l/s
Pumping speed for He 255 l/s
Pumping speed for N₂ 260 l/s
Compression ratio for Ar > 1 · 10¹¹
Compression ratio for CF₄ > 1 · 10¹¹
Compression ratio for H₂ 9 · 10⁵
Compression ratio for He > 1 · 10⁸
Compression ratio for N₂ > 1 · 10¹¹
Gas throughput at full rotational speed for Ar 7 mbar l/s
Gas throughput at full rotational speed for CF₄ 8 mbar l/s
Gas throughput at full rotational speed for He 20 mbar l/s
Gas throughput at full rotational speed for H₂ > 14 mbar l/s
Gas throughput at full rotational speed for N₂ 14 mbar l/s
Fore Vacuum max. for N₂ 25 mbar
Fore Vacuum max. for CF₄ 20 mbar
Fore Vacuum max. for He 8.5 mbar
Fore Vacuum max. for H₂ 20 mbar
Fore Vacuum max. for N₂ 20 mbar
Ultimate pressure with OnToolTM DryPump < 1 · 10-7 mbar < 5 · 10-10 mbar < 1 · 10-7 mbar
Run-up time 1.8 min
Ultimate pressure < 1 · 10⁻ hPa
< 1 · 10⁻¹⁰ hPa
Rotation speed ± 2 % 60,000 rpm
Rotation speed: variable 20-100 %
Sound pressure level ≤ 50 dB (A)
Protection category IP 54
Operating voltage 100-120/200-240 V AC, 50/60 Hz
Operating voltage power supply 90-265 V AC
Integral leak rate < 1 · 10⁻ mbar l/s
Power consumption max. 300 W
Current consumption max. 12.5 A
Venting connection G 1/8"
Weight 6.7 kg 8.7 kg 7 kg
Cooling method, standard Water
Cooling method, optional Air
Cooling water temperature 15-35 °C
Cooling water consumption 50 l/h
Permissible magnetic field max. 5.5 mT
Interfaces RS-485, Remote
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