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EDWARDS | STP-H2001 Pump Specification

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EDWARDS

STP-H2001 Pump Specification


Parameter STP-H2001 Series
Flange size 
Inlet port flange VG250/ISO250F/ICF305
Outlet port flange KF40
Pumping speed (L/s)
N₂ 2100
He 1850
H₂ 1550
Compression ratio   N₂ >10 ⁸
H₂ 2.5×10 ⁵
H₂ 10 ⁴
Ultimate pressure 10⁻⁷(10) order (after baking) Pa 
Maximum working pressure 5 (0.038) Pa (SCCM) : Water cooling / TMS unit used
Allowable outlet port pressure 270 (2) Pa (Torr):Water cooling / TMS unit used
Rated speed 27,000 rpm
Starting time 7 min
Stopping time 8 min
Noise < 50 (at 27,000rpm) dB
Baking temperature < 120 °C
Lubricating oil Not necessary
Installation position Vertical
Cooling method
Water cooling
Emergency vent. valve No
Cooling pipe material Stainless steel
Backing pump >540 L/min
Mass 60 kg
Ambient temperature range 0 to 40 °C
Storage temperature range - 25 to + 55 °C
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