EDWARDS | STP-H2001 Pump Specification
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EDWARDS
STP-H2001 Pump Specification
Parameter | STP-H2001 Series | |||
---|---|---|---|---|
Flange size |
Inlet port flange | VG250/ISO250F/ICF305 | ||
Outlet port flange | KF40 | |||
Pumping speed (L/s) |
N₂ | 2100 | ||
He | 1850 | |||
H₂ | 1550 | |||
Compression ratio | N₂ | >10 ⁸ | ||
H₂ | 2.5×10 ⁵ | |||
H₂ | 10 ⁴ | |||
Ultimate pressure | 10⁻⁷(10⁻⁹) order (after baking) Pa | |||
Maximum working pressure | 5 (0.038) Pa (SCCM) : Water cooling / TMS unit used | |||
Allowable outlet port pressure | 270 (2) Pa (Torr):Water cooling / TMS unit used | |||
Rated speed | 27,000 rpm | |||
Starting time | 7 min | |||
Stopping time | 8 min | |||
Noise | < 50 (at 27,000rpm) dB | |||
Baking temperature | < 120 °C | |||
Lubricating oil | Not necessary | |||
Installation position | Vertical | |||
Cooling method |
Water cooling | |||
Emergency vent. valve | No | |||
Cooling pipe material | Stainless steel | |||
Backing pump | >540 L/min | |||
Mass | 60 kg | |||
Ambient temperature range | 0 to 40 °C | |||
Storage temperature range | - 25 to + 55 °C |