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ULVAC | UTM-350FH Pump Specification

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ULVAC

UTM-350FH Pump Specification


Parameter UTM-350FH
Flange size Inlet JIS VG1000 ICF152
Outlet NW25
Pumping speed (L/s) N₂ 350  330
H₂ 320  310
Max. compression ratio N₂ > 10¹⁰
H₂ 1×10⁴
Rotor blade surface treatment  Ni-Plating
Max. pressure at inlet 
(at max. flow)
N₂ 43
Max. pressure at outlet 
(at max. flow)
N₂ 410
Max. pressure at outlet
(at 100SCCM)
N₂  930
Max. flow rate of N2  SCCM(Pa L/s) 850 (1430)
Max. flow rate of Ar  SCCM(Pa L/s) 370 (620)
Ultimate pressure 10 Pa
Rotational speed 45,000 rpm
Acceleration/deceleration time  Approx. 4/4 min
Bearing type Totally active magnetic bearings
Baking temperature ≦ 120 ℃
Cooling Water
Cooling water port/
Flow rate of cooling water
Rc 3/8/≧ 3 L/min
Pressure drop of
cooling water
between inlet and outlet
≧0.05 MPa
Gas purge port/flow rate  NW 10/10 (17) SCCM (PaL/s)
Weight Approx. 17 kg
Recommended
backing vacuum pump
290 L/min
Noise level 64 dBA
Torque at Rotor destruction 1.3×10³ N・m
Motor drive system Control Unit VVVF
Output frequency 750 Hz
Power consumption 0.6 kVA
Input voltage 200 ~ 240±10% ACV
Input frequency 50/60 Hz
Phase Single
Ambient temperature 0 ~ 40 ℃
Weight Approx. 10 kg
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