ULVAC | UTM-350FH Pump Specification
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ULVAC
UTM-350FH Pump Specification
Parameter | UTM-350FH | ||||
---|---|---|---|---|---|
Flange size | Inlet | JIS VG1000 | ICF152 | ||
Outlet | NW25 | ||||
Pumping speed (L/s) | N₂ | 350 | 330 | ||
H₂ | 320 | 310 | |||
Max. compression ratio | N₂ | > 10¹⁰ | |||
H₂ | 1×10⁴ | ||||
Rotor blade surface treatment | Ni-Plating | ||||
Max. pressure at inlet (at max. flow) |
N₂ | 43 | |||
Max. pressure at outlet (at max. flow) |
N₂ | 410 | |||
Max. pressure at outlet (at 100SCCM) |
N₂ | 930 | |||
Max. flow rate of N2 SCCM(Pa L/s) | 850 (1430) | ||||
Max. flow rate of Ar SCCM(Pa L/s) | 370 (620) | ||||
Ultimate pressure | 10⁻⁸ Pa | ||||
Rotational speed | 45,000 rpm | ||||
Acceleration/deceleration time | Approx. 4/4 min | ||||
Bearing type | Totally active magnetic bearings | ||||
Baking temperature | ≦ 120 ℃ | ||||
Cooling | Water | ||||
Cooling water port/ Flow rate of cooling water |
Rc 3/8/≧ 3 L/min | ||||
Pressure drop of cooling water between inlet and outlet |
≧0.05 MPa | ||||
Gas purge port/flow rate | NW 10/10 (17) SCCM (PaL/s) | ||||
Weight | Approx. 17 kg | ||||
Recommended backing vacuum pump |
290 L/min | ||||
Noise level | 64 dBA | ||||
Torque at Rotor destruction | 1.3×10³ N・m | ||||
Motor drive system | Control Unit | VVVF | |||
Output frequency | 750 Hz | ||||
Power consumption | 0.6 kVA | ||||
Input voltage | 200 ~ 240±10% ACV | ||||
Input frequency | 50/60 Hz | ||||
Phase | Single | ||||
Ambient temperature | 0 ~ 40 ℃ | ||||
Weight | Approx. 10 kg |