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OSAKA | TG1300M Pump Specification

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OSAKA

TG1300M Pump Specification


Parameter TG1300M
Flange Inlet VG200 ISO-B200 CF200
Outlet KF40
Volume flow rate, L/S N₂ 1300
N 
(with protective screen)
1230
H₂ 1200
Max. compression ratio N₂ 1×10⁸
H₂ 1.5×10⁴
Base pressure
< 1×10-6 / < 1×10-7 Pa
( < 7.5×10-9 / < 7.5×10-10 Torr )
Max. throughput N₂, sccm 3000
Startup time, min 4 - 5
Shutdown time, min 4 - 5
Max. backing pressure, Pa(Torr) 500(3.8)
Recommended backing
vacuum pump, L/min
≧ 250
Weight, kg 34 / 42
Turbo Controller TC010MA
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