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VARIAN | TwisTorr 74 FS Pump Specification

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VARIAN

TwisTorr 74 FS Pump Specification


Parameter TwisTorr 74 FS
Pumping speed
KF40 CFF 2.75” ISO 63 CFF 4.5”
N₂ 44 L/s 50 L/s 60 L/s 60 L/s
He 33 L/s 40 L/s 54 L/s 54 L/s
H₂ 28 L/s 31 L/s 42 L/s 42 L/s
Ar 40 L/s 51 L/s 59 L/s 59 L/s
Max Gas Throughput   Air Cooling
(35°C ambient temperature)
Water Cooling
(25°C water temp. / 35°C ambient temp.)
N₂ 130 sccm 130 sccm
Ar 80 sccm 80 sccm
Backing pump 5 m3/h
Compression ratio and
foreline tolerance
N₂ 1.0 x 10⁹ >12 mbar
He 2.0 x 10⁵ >10 mbar
H₂ 1.0 x 10⁴ >04 mbar
Ar > 1.0 x 10⁹ >14 mbar
Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode
Base pressure with recomm. forepump < 5 x 10-10 mbar
(< 3.75 x 10⁻¹⁰ Torr)
Inlet flange KF 40, ISO 63, CFF 4.5”, CFF 2.75”
Foreline flange KF16 NW
Rotational speed 70000 rpm (1167 Hz driving frequency)
Start-up time < 2 minutes
Recommended forepump Agilent DS 40M / DS 102 Rotary Vane Pump
Agilent IDP-3/IDP-7 Dry Scroll Pump
Cooling requirements Natural air convection
Forced air or water optional
Operating position Any
Oper. ambient temp. +5 °C to +35 °C
Rel. humidity of air 0 - 90 % (not condensing)
Bakeout temp. 80 °C for ISO (120 °C for CFF) at inlet flange
Lubricant permanent lubrication
Cooling requirements
Air cooling Forced air (5-35 °C ambient temp.)
Air flow temperature +5° C to +35 °C
Water cooling Water temperature from +15°C to +25°C
Water flow min. 65 L/h
Noise Pressure level
(at 1 mt at full speed)
40 dB(A)
Storage temp. -40 °C to +70 °C
Max altitude 3000 m
Weight kg (lbs) ISO 63 2.05 (4.50)
CFF 4.5” 3.50 (7.70)
CFF 2.75” 3.34 (7.35)
KF 40 2.37 (5.22)
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