SHIMADZU | TMP-1003 series Specification
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SHIMADZU
TMP-1003 series Specification
| Parameter | TMP-1003M | TMP-1003MC | TMP-1003LM | TMP-1003LMC | ||
|---|---|---|---|---|---|---|
| Suitable Power supply unit |
EI-D1003M | |||||
| Cooling method |
Cooling fan | Water | ||||
| Ultimate pressure |
10⁻⁹ Pa order | 10⁻⁸ Pa order | 10⁻⁹ Pa order | 10⁻⁸ Pa order | ||
| Maximum allowable inlet pressure (Nitrogen gas) |
1.3 Pa | 400 Pa | ||||
| Maximum allowable outlet pressure |
40 Pa | 630 Pa | ||||
| Pumping speed | nitrogen | 1080 L/s | ||||
| helium | 930 L/s | |||||
| hydrogen | 790 L/s | |||||
| Compression ratio | nitrogen | 1 × 10⁹ or more | ||||
| helium | 8 × 10⁴ | |||||
| hydrogen | 4 × 10³ | |||||
| Rated speed | 35000 rpm | |||||
| Start-up time | 5 minutes or less | |||||
| Mounting position | In any desired direction | |||||
| Bake-out temperature at an inlet flange |
120 ℃ or less | |||||
| Vibration level (by Shimadzu's method) |
0.01μm or less (0-peak) | |||||
| Inlet flange | ICF203 | |||||
| Outlet flange | KF40 | |||||
| Mass | 32 kg or less | |||||
| Admissible throughput of purge gas |
20 to 30 mL/min | |||||
| Admissible pumping speed of backing vacuum pump in case of gas purge |
500 L/min or more | |||||
| Admissible ambient magnetic field |
Radial direction | 3 mT | ||||
| Axial direction | 15 mT | |||||
| Water | Flow rate | N/A | 1 to 3 L/min | |||
| Pressure | 0.2 to 0.5 MPa | |||||
| Temperature | 5 to 30 ℃ | |||||
