EBARA | ET600W Pump Specification
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EBARA
ET600W Pump Specification
| Parameter | ET600W | |
|---|---|---|
| Pumping speed | N2 | 600 l/s |
| H2 | 220 l/s | |
| Ultimate pressure | N2 | > 109 |
| H2 | 5 x 103 | |
| Ultimate pressure | 10-7 order Pa | |
| Allowable outlet pressure | 400 Pa | |
| Flange standard | Inlet side | VG150 |
| Outlet size | KF40 | |
| Run-up time in vacuum | 8 min | |
| Revolution | 35,000 | |
| Installation position | Any | |
| Vibration level (at rated speeds) | < 0.01 µm (0-P) | |
| Cooling system | Water cooling | |
| Cooling water flow rate | > 2 L/min | |
| Cooling water temperature | < 25 °C (77 °F) | |
| Weight of pump | 35kg (77lb) | |
