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ADIXEN | ATH1300M/MT Pump Specification

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ADIXEN(ALCATEL)

ATH1300M/MT Pump Specification


Parameter ATH1300M/MT
Flange, DN 160 ISO-K
160 CF-F
200 ISO-K
200 CF-F
250 ISO-K
250 CF-F
Maximum rotation speed, rpm 34,000
Standby speed, rpm 15000 to 34000
Pumping speed, l/s N₂ 920 1250 1350
He 810 850 850
H₂ 490 550 550
Compression rate H2 1 · 10⁷
He 2 · 10³
N2 1 · 10²
Ultimate pressure without purge, meas.
according to Pneurop standard,
mTorr/mbar
6.10⁻ / 8.10
Maximum pressure at inlet
in continuous operation, mbar
0.5
Maximum permissible
pressure at exhaust, mbar
1.5
Maximum flowrate with N2 (heated),
SCCM
1000
Maximum flowrate with N2 (unheated),
SCCM
3000
Purging maximum flow rate,
SCCM
50
Pressure with 100 SCCM flow,
mTorr/mbar
1.1 / 1.46x10³
Pressure with 200 SCCM flow,
mTorr/mbar
2.26 / 3.0x10³
Vibration level at maximal speed, μm < 0.01
Mounting orientation Any
Power supply required
for heater band (MT)
100-120 V - 50/60 Hz
200-240 V - 50/60 Hz
200 W
Start-up time, min < 5
Maximum start-up power, W 650
Maximum operating power, W 300
Cooling water flow rate, l/h < 60
Water temperature, °C 15 < T < 25
Maximum ambient temperature, °C 40
Weight (DN 160 ISO-K model), kg (lb) 34 (75.5)
Recommended forepump ADP / ADS
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