EBARA | ET300W Pump Specification
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EBARA
ET300W Pump Specification
Parameter | ET300W | |
---|---|---|
Pumping speed | N2 | 320 l/s |
H2 | 200 l/s | |
Ultimate pressure | N2 | > 109 |
H2 | 7 x 103 | |
Ultimate pressure | 10-7 order Pa | |
Allowable outlet pressure | 400 Pa | |
Flange standard | Inlet side | VG150 |
Outlet size | KF25 | |
Run-up time in vacuum | 6 min | |
Revolution | 48,000 | |
Installation position | Any | |
Vibration level (at rated speeds) | < 0.01 µm (0-P) | |
Cooling system | Water cooling | |
Cooling water flow rate | > 2 L/min | |
Cooling water temperature | < 25 °C (77 °F) | |
Weight of pump | 15kg (33lb) |