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ULVAC | UTM-3302FH Pump Specification

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ULVAC

UTM-3302FH Pump Specification


Parameter UTM-3302FH
Flange size Inlet JIS VG350
Outlet NW40
Pumping speed (L/s) N₂ 3300
H₂ 2300
Max. compression ratio N₂ > 10¹¹
H₂ 6×10⁴
Rotor blade surface treatment  Non
Max. pressure at inlet 
(at max. flow)
N₂ 7
Max. pressure at outlet 
(at max. flow)
N₂ 220
Max. flow rate of N2 *4 SCCM(Pa L/s) 1800 (3030)
Max. flow rate of Ar*4 SCCM(Pa L/s) 1100 (1850)
Ultimate pressure 10 Pa
Rotational speed 21,600 rpm
Acceleration/deceleration time  Approx. 12/16 min
Bearing type Totally active magnetic bearings
Baking temperature ≦ 120 ℃
Cooling Water
Cooling water port/
Flow rate of cooling water
Rc 3/8/≧ 3 L/min
Pressure drop of
cooling water
between inlet and outlet
≧0.05 MPa
Weight Approx. 90 kg
Recommended
backing vacuum pump
1500 L/min
Noise level 58 dBA
Torque at Rotor destruction 2.2×10⁴ N・m
Motor drive system Control Unit VVVF
Output frequency 360 Hz
Power consumption 1.6 kVA
Input voltage 200 ~ 240±10% ACV
Input frequency 50/60 Hz
Phase Single
Ambient temperature 0 ~ 40 ℃
Weight Approx. 10 kg
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