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SHIMADZU | TMP-V2304LM Pump Specification

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SHIMADZU

TMP-V2304LM Pump Specification


Parameter TMP-V2304LM
Battery Not Necessary
Inlet flange ISO250B / VG250
Outlet flange KF40
Cooling Method Water Cooled
Mass 56kg
Ultimate pressure (after baking) 10⁻⁷ Pa order
Maximum allowable inlet pressure 4.5 Pa
Maximum allowable outlet pressure 200 Pa
Pumping speed N₂ 2100 L/s
Ar 2000 L/s
Compression ratio N₂ 1 × 10 or more
He 5 × 10³
H₂ 9 × 10²
Rated speed 33,700 rpm
Start-up time 9 mimutes or less
Mounting position In any desired direction
Vibration level 
(by Shimadzu's method)
0.01 μm or less (0-peak)
Recommended flow rate of purge gas 30 mL/min
Recommended pumping speed of
backing pump in case of gas purge
1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact - REMOTE
  (D-sub 37pin female, Screw lock size M2.6 )
  (cf.Section 6.7 "Remote-Control Connector")
- Input:START / STOP / RESET / LOW SPEED
- Output:ROTATION / ACC. / BRAKE / NORMAL /
REMOTE / ALARM / WARNING / CONNECTION
Serial - RS-232C / RS-485
  (D-sub 9pin male, Screw lock size M2.6)
  (cf.Section 6.8 "Communication Specifications")
Speed variation Speed is variable between 25% and 100% of
the reted speed (set as 0.1%)
Alarm History Remembers date, time, and description of
last 99 alarm events.
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