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VARIAN | TV300HT Pump Specification

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VARIAN

TV300HT Pump Specification


Parameter TV300HT
Pumping speed
With CFF 8" or ISO 160 With CFF 6" or ISO 100
N₂ 280 l/s 250 l/s
He 230 l/s 220 l/s 
H₂ 210 l/s 220 l/s
Compression ratio N₂ >2 x 10⁸
He 1 x 10⁵
H₂ 2 x 10⁴
Base pressure
* with recommended mechanical forepump:
    < 2 x 10¹⁰ mbar (< 1.5 x 10¹⁰ Torr)

with recommended diaphragm forepump:
    2 x 10⁻⁸ mbar (1.5 x 10⁻⁸ Torr)
Inlet flange CFF 8" O.D.
ISO 160
CFF 6" O.D.
ISO 100
Foreline flange KF 25 NW
Rotational speed 56000 rpm 
Start-up time < 3 minutes
Recommended forepump mechanical: Varian SD 300
diaphragm: Varian MD 60
Operating position Any
Cooling requirements Natural air convection
Forced air or water optional
Operating ambient temperature + 5° C to + 35° C
Cooling water flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature 120° C at inlet flange max.(CF flange)
80° C at inlet flange max.(ISO flange)
Vibration level (displacement) < 0.01 μm at inlet flange
Lubricant permanent lubrication
Storage temperature - 20° C to + 70° C
Weight kg (lbs) ISO 100 and 160: 4.5 (10)
CFF 6" and 8": 8 (17.6)
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