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EDWARDS | STP-A2203 Series Specification

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EDWARDS

STP-A2203 Series Specification


Parameter STP-A2203 Series
Flange size 
Inlet port flange VG250/ISO250F/ICF305
Outlet port flange KF40
Pumping speed (L/s)
N₂ 2200
H₂ 1700
Compression ratio   N₂ >10 ⁸
H₂ 2.5×10 ⁴
Ultimate pressure 10⁻⁶(10) order (after baking) Pa 
Maximum gas flow-rate 2.5 (1500) Pa・m3/s (SCCM) : Water cooling 
2.0 (1200) Pa・m3/s (SCCM) : TMS unit used
Maximum working pressure 2.7 (0.02) Pa (Torr):Water cooling
1.7 (0.013) Pa (Torr)
:TMS unit used
Allowable backing pressure 400 (3) Pa (Torr):Water cooling/TMS unit used
Rated speed 27,000 rpm
Starting time 7 min
Stopping time 8 min
Noise <50 (at 27,000rpm) dB
Baking temperature <120 °C
Lubricating oil Not necessary
Installation position Free
Cooling method
Water cooling
Backing pump >1,300 L/min
Mass 61 kg
Ambient temperature range 0 to 40 °C
Storage temperature range - 20 to + 55 °C
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