SHIMADZU | TMP-3403LMC Specification
관련링크
본문
SHIMADZU
TMP-3403LMC Specification
Parameter | TMP-3403LMC | |
---|---|---|
Cooling method | Water | |
Ultimate pressure | 10⁻⁷ Pa order | |
Maximum Argon gas through put |
2200 mL/min | |
Maximum allowable inlet pressure (Nitrogen gas) |
10 Pa | |
Maximum allowable outlet pressure |
270 Pa | |
Pumping speed | nitrogen | 3300 L/s |
helium | 3100 L/s | |
hydrogen | 2400 L/s | |
Compression ratio | nitrogen | 1 × 10⁹ or more |
helium | 3 × 10⁵ | |
hydrogen | 1 × 10⁴ | |
Rated speed | 22,020 rpm | |
Start-up time | 15 minutes or less | |
Mounting position | In any desired direction | |
Bake-out temperature at an inlet flange |
120 ℃ or less | |
Vibration level (by Shimadzu's method) |
0.01μm or less (0-peak) | |
Inlet flange | VG350 | |
Outlet flange | KF40 | |
Mass | 70 kg | |
Admissible throughput of purge gas |
20 to 30 mL/min | |
Admissible pumping speed of backing vacuum pump in case of gas purge |
1500 L/min or more | |
Environmental Temperatures | Operation : 0 to 40 ℃ Storage : -25 to 70 ℃ | |
Admissible ambient magnetic field |
Radial direction | 3 mT |
Axial direction | 15 mT | |
Water | Flow rate | 2 to 4 L/min |
Pressure | 0.2 to 0.5 MPa | |
Temperature | 5 to 25 ℃ |